Dr. Bingan Chen is a process scientist at Aixtron Ltd., working on process development of carbon nanotubes/graphene. He obtained his PhD degree from Cambridge University, UK. He received his MEng degree of Materials Science and Engineering from Imperial College London. He has extensive experience on synthesis and applications of carbon nanomaterials (e.g. energy storage devices, electronics, composites and adhesives).
AIXTRON is the world’s leading supplier of equipment for semiconductor epitaxy, as verified by VLSI Research Inc. The company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and optoelectronic applications based on compound, silicon, or organic semiconductor materials, as well as carbon nanotubes, graphene and other nanomaterials. Such components are used in fiber optic communication systems, wireless and mobile telephony applications, optical and electronic storage devices, computing, signalling and lighting.
Title：Industry Perspective on Wafer-scale Thin Film Graphene Growth
SymposiumB02 Large-size, continuous Manufacture Technology of Graphene Film
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Abstract
In the recent years, graphene has attracted the attention of a considerable number of scientists from all scientific areas. The unique properties of this two dimensional material which include, high carrier mobility, electrical conductivity, transparency, thermal conductivity and mechanical strength, make thin film graphene as a prominent candidate for novel electronic, opto and sensing applications.
This presentation puts into perspective thin film graphene growth technology by chemical vapour deposition and compares it with other depositions technologies at AIXTRON. We start with examined the published growth mechanisms for graphene and use this as the key development drivers for deposition equipment features.
Growth results are presented from small scale up to 300mm wafer scale. The use of in-situ growth monitoring and graphene electronic and opto device results are also presented.
Finally, three different integration schemes and value chain opportunities for graphene thin film production are discussed.
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